Stream 1:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24      Message Type Descriptions
Stream 2:  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30  31  32  33  34  35  36  37  38  39  40  41  42  43  44  45  46  47  48  49  50
Stream 3:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30  31  32  33  34  35  36
Stream 4:  1  2  3  5  7  9  11  13  15  17  18  19  20  21  22  23  24  25  26  27  29  31  33  35  37  39  41
Stream 5:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18
Stream 6:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30
Stream 7:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30  31  32  33  34  35  36  37  38  39  40  41  42  43  44
Stream 9:  1  3  5  7  9  11  13
Stream 10:  1  2  3  4  5  6  7  9  10
Stream 12:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19
Stream 13  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16
Stream 14:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28
Stream 15:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30  31  32  33  34  35  36  37  38  39  40  41  42  43  44  45  46  47  48  49  50  51  52  53  54
Stream 16:  1  2  3  4  5  6  7  8  9  10  11  12  15  16  17  18  19  20  21  22  23  24  25  26  27  28  29  30
Stream 17:  1  2  3  4  5  6  7  8  9  10  11  12  13  14
Stream 18:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16
Stream 19:  1  2  3  4  5  6  7  8  9  10  11  12  13  14  15  16  17  18  19  20

 S1F0 Not On Line
 S1F1 Are You There?
 S1F2 On Line Data
 S1F3 Selected Equipment Status Request
 S1F4 Selected Equipment Status Data
 S1F5 Formatted Status Request
 S1F6 Formatted Status Data
 S1F7 Fixed Form Request
 S1F8 Fixed Form Data
 S1F9 Material Transfer Status Request
 S1F10 Material Transfer Status Data
 S1F11 Status Variable Namelist Request
 S1F12 Status Variable Namelist Reply
 S1F13 Establish Communications Request
 S1F14 Establish Communications Request Acknowledge
 S1F15 Request OFF-LINE
 S1F16 OFF-LINE Acknowledge
 S1F17 Request ON-LINE
 S1F18 ON-LINE Acknowledge
 S1F19 Get Attribute
 S1F20 Attribute Data
 S1F21 Data Variable (DVVAL) Namelist Request
 S1F22 Data Variable (DVVAL) Namelist Reply
 S1F23 Collection Event Namelist Request
 S1F24 Collection Event Namelist Reply
 S2F0 Abort Transaction
 S2F1 Service Program Load Inquire
 S2F2 Service Program Load Grant
 S2F3 Service Program Send
 S2F4 Service Program Send Acknowledge
 S2F5 Service Program Load Request
 S2F6 Service Program Load Data
 S2F7 Service Program Run Send
 S2F8 Service Program Run Acknowledge
 S2F9 Service Program Results Request
 S2F10 Service Program Results Data
 S2F11 Service Program Directory Request
 S2F12 Service Program Directory Data
 S2F13 Equipment Constant Request
 S2F14 Equipment Constant Data
 S2F15 New Equipment Constant Send
 S2F16 New Equipment Constant Ack
 S2F17 Date and Time Request
 S2F18 Date and Time Data
 S2F19 Reset/Initialize Send
 S2F20 Reset Acknowledge
 S2F21 Remote Command Send
 S2F22 Remote Command Acknowledge
 S2F23 Trace Initialize Send
 S2F24 Trace Initialize Acknowledge
 S2F25 Loopback Diagnostic Request
 S2F26 Loopback Diagnostic Data
 S2F27 Initiate Processing Request
 S2F28 Initiate Processing Acknowledge
 S2F29 Equipment Constant Namelist Request
 S2F30 Equipment Constant Namelist
 S2F31 Date and Time Set Request
 S2F32 Date and Time Set Acknowledge
 S2F33 Define Report
 S2F34 Define Report Acknowledge
 S2F35 Link Event Report
 S2F36 Link Event Report Acknowledge
 S2F37 Enable/Disable Event Report
 S2F38 Enable/Disable Event Report Acknowledge
 S2F39 Multi-block Inquire
 S2F40 Multi-block Grant
 S2F41 Host Command Send
 S2F42 Host Command Acknowledge
 S2F43 Configure Spooling
 S2F44 Configure Spooling Acknowledge
 S2F45 Define Variable Limit Attributes
 S2F46 Define Variable Limit Attributes Acknowledge
 S2F47 Variable Limit Attribute Request
 S2F48 Variable Limit Attribute Send
 S2F49 Enhanced Remote Command
 S2F50 Enhanced Remote Command Acknowledge
 S3F0 Abort Transaction
 S3F1 Material Status Request
 S3F2 Material Status Data
 S3F3 Time to Completion Request
 S3F4 Time to Completion Data
 S3F5 Material Found Send
 S3F6 Material Found Ack
 S3F7 Material Lost Send
 S3F8 Material Lost Ack
 S3F9 Matl ID Equate Send
 S3F10 Matl ID Equate Ack
 S3F11 Matl ID Request
 S3F12 Matl ID Request Ack
 S3F13 Matl ID Send
 S3F14 Matl ID Ack
 S3F15 Matls Multi-block Inquire
 S3F16 Matls Multi-block Grant
 S3F17 Carrier Action Request
 S3F18 Carrier Action Ack
 S3F19 Cancel All Carrier Out Req
 S3F20 Cancel All Carrier Out Ack
 S3F21 Port Group Defn
 S3F22 Port Group Defn Ack
 S3F23 Port Group Action Req
 S3F24 Port Group Action Ack
 S3F25 Port Action Req
 S3F26 Port Action Ack
 S3F27 Change Access
 S3F28 Change Access Ack
 S3F29 Carrier Tag Read Req
 S3F30 Carrier Tag Read Data
 S3F31 Carrier Tag Write Data
 S3F32 Carrier Tag Write Ack
 S3F33 Cancel All Pod Out Req
 S3F34 Cancel All Pod Out Ack
 S3F35 Reticle Transfer Job Req
 S3F36 Reticle Transfer Job Ack
 S4F0 Abort
 S4F1 Ready to Send Materials
 S4F2 Ready to Send Ack
 S4F3 Send Material
 S4F5 Handshake Complete
 S4F7 Not Ready to Send
 S4F9 Stuck in Sender
 S4F11 Stuck in Receiver
 S4F13 Send Incomplete Timeout
 S4F15 Material Received
 S4F17 Request to Receive
 S4F18 Request to Receive Ack
 S4F19 Transfer Job Create
 S4F20 Transfer Job Acknowledge
 S4F21 Transfer Job Command
 S4F22 Transfer Job Command Ack
 S4F23 Transfer Command Alert
 S4F24 Transfer Alert Ack
 S4F25 Multi-block Inquire
 S4F26 Multi-block Grant
 S4F27 Handoff Ready
 S4F29 Handoff Command
 S4F31 Handoff Command Complete
 S4F33 Handoff Verified
 S4F35 Handoff Cancel Ready
 S4F37 Handoff Cancel Ready Ack
 S4F39 Handoff Halt
 S4F41 Handoff Halt Ack
 S5F0 Abort Transaction
 S5F1 Alarm Report Send
 S5F2 Alarm Report Ack
 S5F3 Enable/Disable Alarm Send
 S5F4 Enable/Disable Alarm Ack
 S5F5 List Alarms Request
 S5F6 List Alarm Data
 S5F7 List Enabled Alarm Request
 S5F8 List Enabled Alarm Data
 S5F9 Exception Post Notify
 S5F10 Exception Post Confirm
 S5F11 Exception Clear Notify
 S5F12 Exception Clear Confirm
 S5F13 Exception Recover Request
 S5F14 Exception Recover Acknowledge
 S5F15 Exception Recovery Complete Notify
 S5F16 Exception Recovery Complete Confirm
 S5F17 Exception Recovery Abort Request
 S5F18 Exception Recovery Abort Ack
 S6F0 Abort Transaction
 S6F1 Trace Data Send
 S6F2 Trace Data Ack
 S6F3 Discrete Variable Data Send
 S6F4 Discrete Variable Data Send Ack
 S6F5 Multi-block Data Send Inquire
 S6F6 Multi-block Grant
 S6F7 Data Transfer Request
 S6F8 Data Transfer Data
 S6F9 Formatted Variable Send
 S6F10 Formatted Variable Ack
 S6F11 Event Report Send
 S6F12 Event Report Ack
 S6F13 Annotated Event Report Send
 S6F14 Annotated Event Report Ack
 S6F15 Event Report Request
 S6F16 Event Report Data
 S6F17 Annotated Event Report Request
 S6F18 Annotated Event Report Data
 S6F19 Individual Report Request
 S6F20 Individual Report Data
 S6F21 Annotated Individual Report Request
 S6F22 Annotated Individual Report Data
 S6F23 Request or Purge Spooled Data
 S6F24 Request or Purge Spooled Data Ack
 S6F25 Notification Report Send
 S6F26 Notification Report Send Ack
 S6F27 Trace Report Send
 S6F28 Trace Report Send Ack
 S6F29 Trace Report Request
 S6F30 Trace Report Data
 S7F0 Abort Transaction
 S7F1 Process Program Load Inquire
 S7F2 Process Program Load Grant
 S7F3 Process Program Send
 S7F4 Process Program Send Acknowledge
 S7F5 Process Program Request
 S7F6 Process Program Data
 S7F7 Process Program ID Request
 S7F8 Process Program ID Data
 S7F9 Matl/Process Matrix Request
 S7F10 Matl/Process Matrix Data
 S7F11 Matl/Process Matrix Update Send
 S7F12 Matl/Process Matrix Update Ack
 S7F13 Matl/Process Matrix Delete Entry Send
 S7F14 Delete Matl/Process Matrix Entry Acknowledge
 S7F15 Matrix Mode Select Send
 S7F16 Matrix Mode Select Ack
 S7F17 Delete Process Program Send
 S7F18 Delete Process Program Acknowledge
 S7F19 Current Process Program Dir Request
 S7F20 Current Process Program Data
 S7F21 Process Capabilities Request
 S7F22 Process Capabilities Data
 S7F23 Formatted Process Program Send
 S7F24 Formatted Process Program Acknowledge
 S7F25 Formatted Process Program Request
 S7F26 Formatted Process Program Data
 S7F27 Process Program Verification Send
 S7F28 Process Program Verification Acknowledge
 S7F29 Process Program Verification Inquire
 S7F30 Process Program Verification Grant
 S7F31 Verification Request Send
 S7F32 Verification Request Acknowledge
 S7F33 Process Program Available Request
 S7F34 Process Program Availability Data
 S7F35 Process Program for MID Request
 S7F36 Process Program for MID Data
 S7F37 Large PP Send
 S7F38 Large PP Send Ack
 S7F39 Large Formatted PP Send
 S7F40 Large Formatted PP Ack
 S7F41 Large PP Req
 S7F42 Large PP Req Ack
 S7F43 Large Formatted PP Req
 S7F44 Large Formatted PP Req Ack
 S8F0 Abort Transaction
 S8F1 Boot Program Request
 S8F2 Boot Program Data
 S8F3 Executive Program Request
 S8F4 Executive Program Data
 S9F0 Abort Transaction
 S9F1 Unknown Device ID
 S9F3 Unknown Stream
 S9F5 Unknown Function
 S9F7 Illegal Data
 S9F9 Transaction Timeout
 S9F11 Data Too Long
 S9F13 Conversation Timeout
 S10F0 Abort Transaction
 S10F1 Terminal Request
 S10F2 Terminal Request Acknowledge
 S10F3 Terminal Display, Single
 S10F4 Terminal Display, Single Acknowledge
 S10F5 Terminal Display, Multi-Block
 S10F6 Terminal Display, Multi-Block Acknowledge
 S10F7 Multi-block Not Allowed
 S10F9 Broadcast
 S10F10 Broadcast Acknowledge
 S11F0 File Transaction Abort (Obsolete)
 S11F1 File Access Inquire (Obsolete)
 S11F2 File Access Grant (Obsolete)
 S11F3 File Write (Obsolete)
 S11F4 File Write Acknowledge (Obsolete)
 S11F5 File Read Request (Obsolete)
 S11F6 File Read Data (Obsolete)
 S11F7 File Close (Obsolete)
 S11F9 File Delete (Obsolete)
 S11F11 File Directory Request (Obsolete)
 S11F12 File Directory Data (Obsolete)
 S11F13 File Exist? (Obsolete)
 S11F14 File Length Data (Obsolete)
 S12F0 Abort Transaction
 S12F1 Map Setup Data Send
 S12F2 Map Setup Data Acknowledge
 S12F3 Map Setup Data Request
 S12F4 Map Setup Data
 S12F5 Map Transmit Inquire
 S12F6 Map Transmit Grant
 S12F7 Map Data Send Type 1
 S12F8 Map Data Ack Type 1
 S12F9 Map Data Send Type 2
 S12F10 Map Data Ack Type 2
 S12F11 Map Data Send Type 3
 S12F12 Map Data Ack Type 3
 S12F13 Map Data Request Type 1
 S12F14 Map Data Type 1
 S12F15 Map Data Request Type 2
 S12F16 Map Data Type 2
 S12F17 Map Data Request Type 3
 S12F18 Map Data Type 3
 S12F19 Map Error Report Send
 S13F0 Abort Transaction
 S13F1 Send Data Set Send
 S13F2 Send Data Set Ack
 S13F3 Open Data Set Request
 S13F4 Open Data Set Data
 S13F5 Read Data Set Request
 S13F6 Read Data Set Data
 S13F7 Close Data Set Send
 S13F8 Close Data Set Ack
 S13F9 Reset Data Set Send
 S13F10 Reset Data Set Ack
 S13F11 Data Set Obj Multi-Block Inquire
 S13F12 Data Set Obj Multi-Block Grant
 S13F13 Table Data Send
 S13F14 Table Data Ack
 S13F15 Table Data Request
 S13F16 Table Data
 S14F0 Abort Transaction
 S14F1 Get Attributes
 S14F2 Attribute Data
 S14F3 Set Attributes
 S14F4 Set Attributes Reply
 S14F5 Get Type
 S14F6 Type Data
 S14F7 Get Attribute Names
 S14F8 Attribute Names
 S14F9 Create Obj Request
 S14F10 Create Obj Ack
 S14F11 Delete Obj Request
 S14F12 Delete Obj Ack
 S14F13 Object Attach Request
 S14F14 Object Attach Ack
 S14F15 Attached Obj Action Req.
 S14F16 Attached Obj Action Ack
 S14F17 Supervised Obj Action Req
 S14F18 Supervised Obj Action Ack
 S14F19 Generic Service Req
 S14F20 Generic Service Ack
 S14F21 Generic Service Completion
 S14F22 Generic Service Comp Ack
 S14F23 Multi-block Generic Service Inquire
 S14F24 Multi-block Generic Service Grant
 S14F25 Service Name Request
 S14F26 Service Name Data
 S14F27 Service Parameter Name Req
 S14F28 Service Parameter Name Data
 S15F0 Abort Transaction
 S15F1 Recipe Management MBI
 S15F2 Recipe Management MBI Grant
 S15F3 Recipe Namespace Action Req
 S15F4 Recipe Namespace Action
 S15F5 Recipe Namespace Rename Req
 S15F6 Recipe Namespace Rename Ack
 S15F7 Recipe Space Req
 S15F8 Recipe Space Data
 S15F9 Recipe Status Request
 S15F10 Recipe Status Data
 S15F11 Recipe Version Request
 S15F12 Recipe Version Data
 S15F13 Recipe Create Req
 S15F14 Recipe Create Ack
 S15F15 Recipe Store Req
 S15F16 Recipe Store Ack
 S15F17 Recipe Retrieve Req
 S15F18 Recipe Retrieve Data
 S15F19 Recipe Rename Req
 S15F20 Recipe Rename Ack
 S15F21 Recipe Action Req
 S15F22 Recipe Action Ack
 S15F23 Recipe Descriptor Req
 S15F24 Recipe Descriptor Data
 S15F25 Recipe Parameter Update Req
 S15F26 Recipe Parameter Update Ack
 S15F27 Recipe Download Req
 S15F28 Recipe Download Ack
 S15F29 Recipe Verify Req
 S15F30 Recipe Verify Ack
 S15F31 Recipe Unload Req
 S15F32 Recipe Unload Data
 S15F33 Recipe Select Req
 S15F34 Recipe Select Ack
 S15F35 Recipe Delete Req
 S15F36 Recipe Delete Ack
 S15F37 DRNS Segment Approve Action Req
 S15F38 DRNS Segment Approve Action Ack
 S15F39 DRNS Recorder Seg Req
 S15F40 DRNS Recorder Seg Ack
 S15F41 DRNS Recorder Mod Req
 S15F42 DRNS Recorder Mod Ack
 S15F43 DRNS Get Change Req
 S15F44 DRNS Get Change Ack
 S15F45 DRNS Mgr Seg Aprvl Req
 S15F46 DRNS Mgr Seg Aprvl Ack
 S15F47 DRNS Mgr Rebuild Req
 S15F48 DRNS Mgr Rebuild Ack
 S15F49 Large Recipe Download Req
 S15F50 Large Recipe Download Ack
 S15F51 Large Recipe Upload Req
 S15F52 Large Recipe Upload Ack
 S15F53 Recipe Verification Send
 S15F54 Recipe Verification Ack
 S16F0 Abort
 S16F1 Process Job Data MBI
 S16F2 PJD MBI Grant
 S16F3 Process Job Create Req
 S16F4 Process Job Create Ack
 S16F5 Process Job Cmd Req
 S16F6 Process Job Cmd Ack
 S16F7 Process Job Alert Notify
 S16F8 Process Job Alert Cfm
 S16F9 Process Job Event Notify
 S16F10 Process Job Event Cfm
 S16F11 PRJobCreateEnh
 S16F12 PRJobCreateEnh Ack
 S16F13 PRJobDuplicateCreate
 S16F14 PRJobDuplicateCreate Ack
 S16F15 PRJobMultiCreate
 S16F16 PRJobMultiCreate Ack
 S16F17 PRJobDequeue
 S16F18 PRJobDequeue Ack
 S16F19 PRJob List Req
 S16F20 PRJob List Data
 S16F21 PRJob Create Limit Req
 S16F22 PRJob Create Limit Data
 S16F23 PRJob Recipe Variable Set
 S16F24 PRJob Recipe Variable Ack
 S16F25 PRJob Start Method Set
 S16F26 PRJob Start Method Ack
 S16F27 Control Job Command
 S16F28 Control Job Command Ack
 S16F29 PRSetMtrlOrder
 S16F30 PRSetMtrlOrder Ack
 S17F0 Abort
 S17F1 Data Report Create Req
 S17F2 Data Report Create Ack
 S17F3 Data Report Del Req
 S17F4 Data Report Del Ack
 S17F5 Trace Create Req
 S17F6 Trace Create Ack
 S17F7 Trace Delete Req
 S17F8 Trace Delete Ack
 S17F9 Collection Event Link Req
 S17F10 Collection Event Link Ack
 S17F11 Collection Event Unlink
 S17F12 Collection Event Unlink Ack
 S17F13 Trace Reset Req
 S17F14 Trace Reset Ack
 S18F0 Abort
 S18F1 Read Attribute Req
 S18F2 Read Attribute Data
 S18F3 Write Attribute Req
 S18F4 Write Attribute Ack
 S18F5 Read Request
 S18F6 Read Data
 S18F7 Write Data Request
 S18F8 Write Data Ack
 S18F9 Read ID Req
 S18F10 Read ID Data
 S18F11 Write ID Req
 S18F12 Write ID Ack
 S18F13 Subsystem Command
 S18F14 Subsystem Command Ack
 S18F15 Read 2D Code Cond Req
 S18F16 Read 2D Code Cond Data
 S19F0 Abort
 S19F1 Get PDE Directory
 S19F2 PDE Directory Data
 S19F3 Delete PDE
 S19F4 Delete PDE Ack
 S19F5 Get PDE Header
 S19F6 PDE Header Data
 S19F7 Get PDE
 S19F8 PDE Data
 S19F9 Request to Send PDE
 S19F10 Send PDE Grant
 S19F11 Send PDE
 S19F12 Send PDE Ack
 S19F13 PDE Transfer Report
 S19F14 Transfer Report Ack
 S19F15 Resolve PDE Request
 S19F16 Resolve PDE Data
 S19F17 Verify PDE
 S19F18 Verification Data
 S19F19 Multiblock Inquire
 S19F20 Multiblock Grant